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硅半导体·液晶
| 气体名称 | |||
| SiH4 | Silane | PH3 | Phosphine |
| B2H6 | Diborane | SiH2Cl2 | Dichlorosilane |
| GeH4 | Germane | Si2H6 | Disilane |
| SiH (CH3) 3 | Trimethyl Silane | SiF4 | Silicon Tetrafluoride |
| WF6 | Tungsten Hexafluoride | TiCl4 | Titanium Tetrachloride |
| NH3 | Ammonia | N2O | Nitrous Oxide |
| C3H6 | Propylene | ||
| 气体名称 | |||
| NF3 | Nitrogen Trifluoride | CO | Carbon monoxide |
| C2F6 | Hexafluoro Ethane | C3F8 | Octafluoro Propane |
| C4F6 | Hexafluoro-1,3-butadiene | C4F8 | Octafluorocyclobutane |
| C5F8 | Octafluorocyclopentene | CF4 | Tetrafluoromethane |
| CHF3 | Trifluoromethane | COS | Carbonyl Sulfide |
| C2HF5 | Pentafluoroethane | CH2F2 | Difluoromethane |
| CH3F | Methyl Fluoride | ClF3 | Chlorine Trifluoride |
| SF6 | Sulfur Hexafluoride | Cl2 | Chlorine |
| BCl3 | Boron Trichloride | HBr | Hydrogen Bromide |
| HCl | Hydrogen Chloride | HF | Hydrogen Fluoride |
| 气体名称 | |||
| SDS AsH3 | Arsine | SDS PH3 | Phosphine |
| SDS 11BF3 | Boron Trifluoride | SDS SiF4 | Silicon Tetrafluoride |
| SDS GeF4 | Germanium tetrafluoride | SDS H2Se | Hydrogen Selenide |
| AsH3混合 | Arsine Mixtures | PH3混合 | Phosphine Mixtures |
| BF3 | Boron Trifluoride | PF3 | Phosphorus Trifluoride |
| SiF4 | Silicon Tetrafluoride | GeF4 | Germanium Tetrafluoride |