AsH3 Arsine
| Specifications | ||||||||
| UL-AsH3 | SS-AsH3 | AsH3 | AsH3 | |||||
| Purity | ＞99.9999 | vol.％ | ＞99.9999 | vol.％ | ＞99.9998 | vol.％ | ＞99.9998 | vol.％ |
| Impurity | ||||||||
| N2 | ＜0.5 | vol.ppm | ＜0.5 | vol.ppm | ＜1.00 | ppm | ＜1.00 | ppm |
| O2 | ＜0.1 | vol.ppm | ＜0.1 | vol.ppm | ＜0.10 | ppm | ＜0.10 | ppm |
| CO | ＜0.02 | vol.ppm | ＜0.1 | vol.ppm | ＜0.10 | ppm | ＜0.10 | ppm |
| CO2 | ＜0.02 | vol.ppm | ＜0.1 | vol.ppm | ＜0.10 | ppm | ＜0.10 | ppm |
| CH4 | ＜0.05 | vol.ppm | - | ＜0.10 | ppm | - | ||
| H2O | ＜0.05 | vol.ppm | ＜0.1 | vol.ppm | ＜0.10 | ppm | ＜0.10 | ppm |
| SiH4 | ＜0.01 | vol.ppm | ＜0.0005 | vol.ppm | ＜0.05 | ppm | ＜20 | ppb |
| GeH4 | ＜0.0015 | vol.ppm | ＜0.0015 | vol.ppm | ＜0.05 | ppm | ＜20 | ppb |
| H2S | ＜0.1 | vol.ppm | ＜0.01 | vol.ppm | ＜0.10 | ppm | ＜50 | ppb |
| H.C. | - | ＜0.1 | vol.ppm | - | ＜0.1 | ppm | ||
| Specifications | ||||
| Purity | >99.999 | vol.％ | >99.9998 | vol.％ |
| Cylinder・Contents Cylinder/Content |
Valve for Specialty Gas Valve |
|
| 48ℓ： | ～19kg （2.0MPa） | JIS.W22-14L |
| 9.4ℓ： | ～3kg （1.5MPa） | |
| Special High Pressure Gas | |
| Molecular Weight | 77.95 |
| UN Code | 2188 |
| Permissible Concentration | TLV-TWA 0.005ppm, 0.016mg/㎥ |
| Description | Colorless Gas |
| Odor | Garlic Like Odor |
| Specific Gravity | 2.69（20℃, 0.1MPa） |
| Boiling Point | -62.5℃ |
| Density(Vapor) | 3.484kg/㎥ （0℃, 0.1MPa） |
| Density(Liquid) | 1.604kg/ℓ（-64.3℃） |
| Sphere of Explosion | 0.8～98％ |
