PH3 Phosphine
| Specifications | ||||
| UL-PH3 | S-PH3 | |||
| Purity | ＞99.9999 | vol.％ | ＞99.9998 | vol.％ |
| Impurity | ||||
| N2 | ＜0.5 | vol.ppm | ＜1 | vol.ppm |
| O2 | ＜0.1 | vol.ppm | ＜0.1 | vol.ppm |
| CO | ＜0.05 | vol.ppm | ＜0.1 | vol.ppm |
| CO2 | ＜0.05 | vol.ppm | ＜0.1 | vol.ppm |
| CH4 | ＜0.05 | vol.ppm | ＜0.1 | vol.ppm |
| H2O | ＜0.05 | vol.ppm | ＜0.1 | vol.ppm |
| SiH4 | ＜0.05 | vol.ppm | ＜0.05 | vol.ppm |
| H2S | ＜0.1 | vol.ppm | ＜0.1 | vol.ppm |
| ※AsH3 | ＜0.5 | vol.ppm | - | |
| ※X | ＜0.001 | vol.ppm | - | |
| H.C. | - | - | ||
| GeH4 | - | - | ||
The mark of “※” is excluded from the definition of purity.
| Specifications | ||||
| Purity | ＞99.9995 | vol.％ | ＞99.999 | vol.％ |
| Cylinder・Contents Cylinder/Content |
Valve for Specialty Gas Valve |
|
| 48L、47L： | ～1.5kg | JIS.W22-14L |
| 10L、9.4L： | ～300g | |
| 3.4L、1L、0.35L： | ～2.9MPa | |
| Mixed Gas | Balance Gas | Concentration | Pressure | Valve | |
| N2、Ar、He、H2 | 2ppm～50％ | 2ppm～14％ Over 14% to 15％ Over 15% to 20％ Over 20% to 30％ Over 30% to 50％ |
14.7MPa 11.8MPa 9.81MPa 6.9MPa 3.9MPa |
JIS.W22-14L |
|
| SiH4 | 1,000ppm～50％ | ～5.9MPa |
|||
| Special High Pressure Gas | |
| Molecular Weight | 34.00 |
| UN Code | 2199 |
| Permissible Concentration | TLV-TWA 0.05 ppm |
| Description | Colorless Gas |
| Odor | Odor of Decaying Fish |
| Specific Gravity | 1.184（25℃, 0.1MPa） |
| Boiling Point | -87.7℃ |
| Density(Vapor) | 1.53kg/㎥（0℃、1atm） |
| Density(Liquid) | 0.744kg/ℓ（-87.7℃） |
| Sphere of Explosion | 1.32～98％ |
