TMA Trimethyl Aluminum
| Specifications | ||
| Metal Impurities | UL-TMG | |
| Purity | ≦99.999 | wt.％ |
| Impurity | ||
| Al | - | |
| Ca | ≦0.02 | wt.ppm |
| Cd | ≦0.03 | wtl.ppm |
| Cr | ≦0.08 | wtl.ppm |
| Cu | ≦0.04 | wtl.ppm |
| Fe | ≦0.02 | wtl.ppm |
| Mg | ≦0.02 | wtl.ppm |
| Mn | ≦0.02 | wtl.ppm |
| Si | ≦0.7 | wtl.ppm |
| Zn | ≦0.04 | wtl.ppm |
| 物性データ | |
| Molecular Weight | 72.1 |
| UN Code | 3051 |
| Permissible Concentration | TLV-TWA 2mg(Al)/㎥ |
| Description | Colorless Liquid |
| Odor | - |
| Specific Gravity | 0.752（20℃） |
| Boiling Point | 127.1℃ |
| melting Point | 15.3℃ |
| Vapor Pressure | 9mmHg（20℃） |
