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Multi- Purpose ・ Inert Gases
| Gas name | |||
| SiHCl3 | Trichlorosilane | NO | Nitric Oxide |
| H2 | Hydrogen | D2 | Deuterium |
| Argon + Oxygen Mixture Gas | Argon+Oxygen Mixture Gas | Helium + Oxygen Mixture Gas | Helium+Oxygen Mixture Gas |
| Argon + Methane Mixture Gas | Argon+Methane Mixture Gas | Nitrogen + Hydroge Mixture Gas | Nitrogen+Hydrogen Mixture Gas |
| Gas name | |||
| N2 | Nitrogen | O2 | Oxygen |
| Ar | Argon | He | Helium |
| CO2 | Carbon Dioxide | ||