TAIYO NIPPON SANSO

Electronics Gas
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PH3 Phosphine

Specifications
Purity >99.9995 vol.%
Impurity    
N2 <1 vol.ppm
O2 <0.5 vol.ppm
CO <0.5 vol.ppm
CO2 <0.5 vol.ppm
CH4 <0.1 vol.ppm
H2O <1 vol.ppm
Cylinder・Contents
Cylinder/Content
Valve for Specialty Gas
Valve
48ℓ: ~9kg (4.1MPa) JIS.W22-14L/
DISS632 *option
9.4ℓ: ~1.5kg (2.9MPa)
Mixed Gas Balance Gas Concentration Pressure Cylinder
Cylinder
Valve for Specialty Gas
Valve
N2、Ar、He、H2 1ppm~50% 1ppm10%
1120%
2130%
3150%
14.7MPa
9.81MPa
6.9MPa
3.9MPa
47ℓ/10ℓ JIS.W22-14L/
DISS632 *option
物性データ
Special High Pressure Gas
Molecular Weight 34.00
UN Code 2199
Permissible Concentration TLV-TWA 0.3ppm 0.42mg/㎥
Description Colorless Gas
Odor 腐魚臭 Odor of Decaying Fish
Specific Gravity 1.184(25℃, 0.1MPa)
Boiling Point -87.7℃
Density(Vapor) 1.4024kg/㎥ (25℃)
Density(Liquid) 0.744kg/ℓ(-87.7℃)
Sphere of Explosion 1.32~98%