TAIYO NIPPON SANSO

Electronics Gas
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SiH2Cl2 Dichlorosilane

Specifications
Purity >99.5 vol.%

●Please contact to our sales representatives for SiH2Cl2 specifications.

Cylinder・Contents
Cylinder/Content
Valve for Specialty Gas
Valve
40ℓ: ~37kg(0.15MPa) JIS.W22-14L/
DISS636 *option
10ℓ: ~9kg (0.15MPa)
物性データ
 
Molecular Weight 101
UN Code 2189
Permissible Concentration TLV value unsettled
(Reference: TLV-C 2ppm 3.0mg/㎥ as HCL)
Description Colorless Gas
Odor Pungent Odor
Specific Gravity 3.52
Boiling Point 8.2℃
Density(Vapor) 4.168kg/㎥ (25℃, 0.1MPa)
Density(Liquid) 1.261kg/ℓ(8.2℃)
Sphere of Explosion 4.1~98.8%