TAIYO NIPPON SANSO

Electronics Gas
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SDS2 SiF4 Silicon Tetrafluoride

Specifications
Purity >99.99 vol.%
Impurity    
N2 <80 vol.ppm
O2 <20 vol.ppm
Cylinder・ *Supply volume
Cylinder / Capacity
Valve for Specialty Gas
Valve
4X(2.25ℓ): 250g(650Torr±50Torr at21℃) 1/4" VCR
7X(0.44ℓ): 50g(650Torr±50Torr at21℃)

※The definition of supply volume shall be a guaranteed value at using rate from 650 to 5Torr.