SDS2 GeF4 Germanium tetrafluoride
| Specifications | ||
| Purity | ＞99.9 | vol.％ |
| Impurity | ||
| N2 | ＜25 | vol.ppm |
| O2 | ＜25 | vol.ppm |
| Ar | ＜25 | vol.ppm |
| CO2 | ＜25 | vol.ppm |
| SO2 | ＜25 | vol.ppm |
| HF | ＜25 | vol.ppm |
| Cylinder・ *Supply volume Cylinder / Capacity |
Valve for Specialty Gas Valve |
|
| 4X（2.25ℓ）： | 802g（650Torr±50Torr at.21℃） | 1/4" VCR |
| 7X（0.44ℓ）： | 160g（650Torr±50Torr at.21℃） | |
※The definition of supply volume shall be a guaranteed value at using rate from 650 to 20Torr.
Enrich SDS 72GeF4 that are concentrated 72Ge more than 50% is available.
« Features of enrich SDS 72GeF4 »
Feature 1: Decreasing of cross-contamination of As(molecular weight: 74.9)
Feature 2: Improvement of source life and throughput
