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Specifications
	Law PH3
Purity	＞99.9995	vol.％
Impurity
N2	＜1	vol.ppm
O2	＜0.5	vol.ppm
CO	＜0.5	vol.ppm
CO2	＜0.5	vol.ppm
CH4	＜0.1	vol.ppm
H2O	＜1	vol.ppm

Mixed Gas	Balance Gas	Concentration	Cylinder	Pressure		Valve
	N2、Ar、He、H2	2ppm～50％	48L 47L 10L 9.4L 3.4L 1L 0.35L	2ppm～14% 14%Over～15% 15%Over～20% 20％Over～30％ 30％Over〜50％	14.7MPa 11.8MPa 9.81MPa 6.9MPa 3.9MPa	JIS.W22-14L
	SiH4	1,000ppm～50%		～5.9MPa		G1/4 19.0R

※Maximum pressure for below 1L-sized cylinder: 4.9MPa

Permissible concentration

Permissible concentration TLV-TWA0.05ppm
0.3ppm(Maximum permissible concentration)

Special High Pressure Gas
Molecular Weight	34.00
UN Code	2199
Permissible Concentration	TLV-TWA　0.05ppm 0.3ppm(Maximum permissible concentration)
Description	Colorless Gas
Odor	Odor of Decaying Fish
Specific Gravity	1.184（25℃, 0.1MPa）
Boiling Point	-87.7℃
Density(Vapor)	1.4024kg/㎥（25℃）
Density(Liquid)	0.744kg/ℓ（-87.7℃）
Sphere of Explosion	1.32～98％

PH3　mixture(PH3＋N2 or Ar or He)

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PH3　mixture(PH3＋SiH4)

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PH3　mixture(PH3＋H2+Ar)

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PH3　mixture(SiH4＋PH3)

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PH3　mixture(PH3＋H2＋N2)

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PH3　mixture(PH3＋H2＋Ar)

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PH3　mixture(PH3＋H2)

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