TAIYO NIPPON SANSO

Electronics Gas
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PF3 Phosphorus Trifluoride

Specifications
Purity >99 vol.%
Impurity    
N2 <3000 vol.ppm
O2 <200 vol.ppm
HCl <500 vol.ppm
Cylinder・Contents
Cylinder/Content
Valve for Specialty Gas
Valve
3.4ℓ: ~1kg JIS.W22-14L
1ℓ: ~300g
0.35ℓ: ~100g G1/4 19.OR
物性データ
High Pressure Gas
Molecular Weight 87.97
UN Code 1955
Description Colorless Gas
Odor Odorless
Specific Gravity 3.03(25℃, 0.1MPa)
Boiling Point -101.2℃
Density(Vapor) 3.59kg/㎥(25℃, 0.1MPa)
Density(Liquid) 1.574kg/ℓ(-101.2℃)