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SiH4  Silane

Specifications
Purity >99.9995 vol.%
Impurity    
N2 <1 vol.ppm
O2+Ar <1 vol.ppm
CO <0.1 vol.ppm
CO2 <0.1 vol.ppm
CH4 <0.1 vol.ppm
T-CL <0.5 vol.ppm
H2O <0.5 vol.ppm
Cylinder・Contents
Cylinder/Content
Valve for Specialty Gas
Valve
47L ~11.75㎏ JIS.W22-14L/
DISS632 *option
10L ~1㎏
Mixed Gas Balance Gas Concentration Pressure Cylinder
Cylinder
Valve for Specialty Gas
Valve
N2、Ar、He、H2 1ppm~50% 10ppm~10%
11~20%
21~50%
14.7MPa
11.8MPa
4.9MPa
47ℓ/10ℓ JIS.W22-14L/
DISS632 ※option
物性データ
Special High Pressure Gas
Molecular Weight 32.12
UN Code 2203
Permissible Concentration TLV-TWA 5ppm 6.6mg/㎥
Description Colorless Gas
Odor Repulsive Odor
Specific Gravity 1.114 (20℃,0.1MPa)
Boiling Point -111.5℃
Density(Vapor) 1.342Kg/㎥ (20℃,0.1MPa)
Density(Liquid) 0.68kg/ℓ (-185℃)
Sphere of Explosion 1.35~98%
Mutagenicity Positive