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PV
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PV
PV
Gas name
SiH
4
Silane
PH
3
Phosphine
B
2
H
6
Diborane
TMB
Trimethylboron
GeH
4
Germane
NH
3
Ammonia
H
2
Se
Hydrogen Selenide
NF
3
Nitrogen Trifluoride
SF
6
Sulfur Hexafluoride
DEZn
Diethylzinc
