TAIYO NIPPON SANSO

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Valve for Specialty Gas

Taiyo Nippon Sanso uses valves with JIS B8246 code which are applied to the high pressure safety laws in Japan, considering charters of specialty gases corrosive etc.).

● Specifications and package of valves [SUS, Diaphragm]

Taiyo Nippon Sanso uses valves with JIS B8246 code which are applied to the high pressure safety laws in Japan, considering charters of specialty gases corrosive etc.).

■ ニューマチックValve for Specialty Gas

仕様

  1. Miniaturized by Single Operated (by Gas pressure)
    Tandem Dual Piston Method (Normal Close)
  2. By combination with other controlling equipment, the valve can be (1)Shut off at the time of emergency,(2)Remote controlled and(3)Auto closed-opened.
  3. Safe for explosion proof. Since N2 or compressed air are used for actuating the valve.
  4. Actuator lock function is installed to prevent form miss-operation.
  5. Easy to connect and take off the piping for actuating pressure due to special tube.
  6. The valve is normal close. On the condition that there is no actuating pressure, the valve maintains to be closed certainly.
  7. Actuating Pressure: 0.6±0.10/Mpa
    Connection for actuating pressure:O.D.4mm type connector
    Material of tube: Polyurethane, Nylon
    Resisted pressure of actuator:1.5MPa
● Option

Valve indicator

■ Pneumatic Valve (for Ion Implantation)

Specifications

  1. Actuating Method: Single Operated Single Piston Method
  2. Resisted pressure of actuator:1.5MPa
  3. Operating pressure:0.5±0.10/Mpa
  4. Connection for actuating pressure:O.D.4mm Special tube connector
  5. Material of tube: Polyurethane, Nylon
■ Manual Valve
● Diaphragm Type
Left
Right
● Key Plate Type
Left
Right
● Direct Diaphragm Valve

Merit

  1. Removing Moisture:
    Elevation of removing moisture for no waste space
  2. Removing Particle:
    Valve can be Removed particle by no spring
Cylinder一覧表
■ Symbols of cylinder valve

例 JIS. W22. 14. R/L

口Connection O.D. 口Number of thread Direction of screw
22:φ22mm
14:14
14:14
L:Left
209:φ20.9mm
  R:Right
225:φ22.5mm    
26:φ26mm
   
■ Applied cylinder

The demand for valves with CGA standard (DISS) is increased. Taiyo Nippon Sanso also prepares these valves.

Specification

●Applied cylinder
 Cylinder bigger than 10ℓ

●Applied gas (examples)

口Connection Gas
CGA632 AsH3, B2H6, PH3, SiH4
CGA640 NF3
CGA716 CF4, CHF3, C2F6
CGA720 NH3
■ Orifice valve to prevent exceeded flowing

Cylinder with orifice valve

Specification

● Orifices whose calibers are 0.2mm or 0.3mm are installed at the outlet of cylinder valve.
● If N2 gas of 47ℓ×14.7MPa with pressure regulation, the flowing rate is about 3,500ℓ/min. However, orifice(0.3mm) is installed at the outlet of the valve, the flowing rate can be controlled with 50~60ℓ/min.
● Gases, such as SiH4, if this kind of gases are flowed with big amount, they will not be flamed of itself but composed explosive mixture gas. For these gases, the valve can prevent an accident beforehand.
● In accordance with gases and mixed density, controlled flow rates are changed. So please contact to us beforehand.
● On orifice valve, 2 labels are attached. The one indicates caliber of orifice. The other is described "Cylinder with orifice installed valve" in Japanese.