SiHCl3 Trichlorosilane
| Specifications | ||
| Purity | ＞99.99 | wt.％ |
| Impurity | ||
| SiCl4 | ＜100 | wt.ppm |
| SiH2Cl2 | ＜100 | wt.ppm |
| SiH3Cl | ＜10 | wt.ppm |
| Cylinder・Contents Cylinder/Content |
Valve for Specialty Gas Valve |
|
| 28.4ℓ： | 20kg | Swagelok |
| Special High Pressure Gas | |
| Molecular Weight | 135.45 |
| UN Code | 1295 |
| Permissible Concentration | TLV value unsettled（Reference: TLV-C 2ppm 3.0mg/㎥ as HCL） |
| Description | Colorless Liquid |
| Odor | Pungent Odor |
| Specific Gravity | 4.70 |
| Boiling Point | 31.8℃ |
| Density(Liquid) | 1.3417kg/ℓ （20℃） |
| Sphere of Explosion | 6～83vol.％ |
| Flash Point | −27～26℃ |
| Ignition Point | 93～104℃ |
