B2H6 Diborane
| Specifications | ||||
| G1 Grade 1 |
G2 Grade 2 |
|||
| Purity | ＞99.999 | vol.％ | ＞99.995 | vol.％ |
| Impurity | ||||
| N2 | ＜1 | vol.ppm | ＜5 | vol.ppm |
| O2 | ＜1 | vol.ppm | ＜1 | vol.ppm |
| CO | ＜0.5 | vol.ppm | ＜1 | vol.ppm |
| CO2 | ＜1 | vol.ppm | ＜5 | vol.ppm |
| CH4 | ＜1 | vol.ppm | ＜10.0 | vol.ppm |
| H2O | ＜0.5 | vol.ppm | ＜1 | vol.ppm |
| Mixed Gas | Balance Gas | Concentration | Pressure | Cylinder Cylinder |
Valve for Specialty Gas Valve |
|
| N2、Ar、He | 10ppm～10％ | Over 5% to 10% Over 1% to 5% Over 0.5% to 1% 0.5% or less ※He base upper limit 11.8 MPa |
2.9 MPa 7.4 MPa 9.81 MPa 14.7 MPa |
47ℓ／10ℓ | JIS.W22-14L／ DISS632 *option |
|
| H2 | Over 5% to 10% Over 1% to 5% 1% or less |
7.4 MPa 9.81 MPa 11.8 MPa |
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| Special High Pressure Gas | |
| Molecular Weight | 27.67 |
| UN Code | 1911 |
| Permissible Concentration | TLV-TWA 0.1ppm |
| Description | Colorless Gas |
| Odor | Vitamin Odor |
| Specific Gravity | 0.965（0℃, 0.1MPa） |
| Boiling Point | -92.8℃ |
| Density(Vapor) | 1.2475kg/㎥（0℃, 0.1MPa） |
| Density(Liquid) | 0.421kg/ℓ（-92.8℃） |
| Sphere of Explosion | 0.84～93.3％ |
