GeH4 Germane
| Specifications | ||
| Purity | ≧ 99.999 | vol.％ |
| Impurity | ||
| Ar+O2 | ≦1 | vol.ppm |
| N2 | ≦2 | vol.ppm |
| H2 | ≦90 | vol.ppm |
| CO | ≦1 | vol.ppm |
| CO2 | ≦1 | vol.ppm |
| CH4 | ≦1 | vol.ppm |
| H2O | ≦0.5 | vol.ppm |
| T-Cl | ≦0.2 | vol.ppm |
| THC | ≦1 | vol.ppm |
| He | ≦300 | vol.ppm |
| Cylinder・Contents Cylinder/Content |
Valve for Specialty Gas Valve |
|
| 47L： | ～500g | JIS.W22-14L |
| 10L： | ～100g | |
| Mixed Gas | Balance Gas | Mixed gas concentration category (MPa) | Pressure | Valve | |||
| ＜1％ | ＜5％ | ≦10％ | |||||
| N2、Ar、He | ≦11.8 | ≦6.4 | ≦4.4 | Over 5% to 10% Over 2% to 5% Over 1% to 2% 1% or less |
4.4 MPa 6.4 MPa 9.81 MPa 11.8 MPa |
JIS.W22-14L | |
| H2 | ≦11.8 | ≦7.8 | ≦5.4 | Over 5% to 10% Over 2% to 5% Over 1% to 2％ 1% or less |
5.4 MPa 7.8 MPa 9.81 MPa 11.8 MPa |
||
| Special High Pressure Gas | |
| Molecular Weight | 76.64 |
| UN Code | 2192 |
| Permissible Concentration | TLV-TWA 0.2ppm |
| Description | Colorless Gas |
| Odor | Weak pungent odor (similar to garlic odor) |
| Specific Gravity | 2.645（0℃, 0.1MPa） |
| Boiling Point | -88.4℃ |
| Density(Vapor) | 3.420kg/㎥ （0℃, 0.1MPa） |
| Density(Liquid) | 1.523kg/ℓ（-142℃） |
