SiH(CH3)3 Trimethyl Silane
| Specifications | ||
| Purity | ＞99.99 | vol.％ |
| Impurity | ||
| H2 | ＜50 | vol.ppm |
| Ar+O2 | ＜2 | vol.ppm |
| N2 | ＜2 | vol.ppm |
| CO | ＜1 | vol.ppm |
| CH4 | ＜5 | vol.ppm |
| CO2 | ＜1 | vol.ppm |
| THC | ＜5 | vol.ppm |
| T-Cl | ＜1 | vol.ppm |
| H2O | ＜1 | vol.ppm |
| Total Hydrocarbons | ＜5 | vol.ppm |
| Mixed Gas | Balance Gas | Concentration | Pressure | Cylinder Cylinder |
Valve for Specialty Gas Valve |
|
| N2、Ar、He、H2 | 100ppm～10％ | 100～5400ppm 1％ 2％ 3～5％ 6～10％ |
14.7MPa 7.8MPa 3.9MPa 1.5MPa 0.7MPa |
47ℓ／10ℓ／3.4ℓ | JIS.W22-14L | |
| High Pressure Gas | |
| Molecular Weight | 74.20 |
| UN Code | 3161 |
| Permissible Concentration | Unsettled（Reference value5ppm） |
| Description | Colorless Gas |
| Odor | Odorless |
| Specific Gravity | 0.63 |
| Melting Point | -135.9℃ |
| Boiling Point | 6.7℃ |
| Vapor Pressure | 0.15MPa（20℃） |
