
Valve for Specialty Gas
Taiyo Nippon Sanso uses valves with JIS B8246 code which are applied to the high pressure safety laws in Japan, considering charters of specialty gases corrosive etc.).
● Specifications and package of valves [SUS, Diaphragm]

Taiyo Nippon Sanso uses valves with JIS B8246 code which are applied to the high pressure safety laws in Japan, considering charters of specialty gases corrosive etc.).
■ ニューマチックValve for Specialty Gas

仕様
- Miniaturized by Single Operated (by Gas pressure)
Tandem Dual Piston Method (Normal Close) - By combination with other controlling equipment, the valve can be (1)Shut off at the time of emergency,(2)Remote controlled and(3)Auto closed-opened.
- Safe for explosion proof. Since N2 or compressed air are used for actuating the valve.
- Actuator lock function is installed to prevent form miss-operation.
- Easy to connect and take off the piping for actuating pressure due to special tube.
- The valve is normal close. On the condition that there is no actuating pressure, the valve maintains to be closed certainly.
- Actuating Pressure: 0.6±0.10/Mpa
Connection for actuating pressure:O.D.4mm type connector
Material of tube: Polyurethane, Nylon
Resisted pressure of actuator:1.5MPa

● Option
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![]() Valve indicator |

■ Pneumatic Valve (for Ion Implantation)
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Specifications
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■ Manual Valve
● Diaphragm Type![]() |
Left![]() |
Right![]() |
● Key Plate Type![]() |
Left![]() |
Right![]() |
● Direct Diaphragm Valve![]() |
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Merit
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■ Symbols of cylinder valve
例 JIS. W22. 14. R/L
口Connection O.D. | 口Number of thread | 口Direction of screw |
22:φ22mm |
14:14 14:14 |
L:Left |
209:φ20.9mm |
R:Right | |
225:φ22.5mm | ||
26:φ26mm |
■ Applied cylinder
The demand for valves with CGA standard (DISS) is increased. Taiyo Nippon Sanso also prepares these valves.
Specification
●Applied cylinder
Cylinder bigger than 10ℓ
●Applied gas (examples)
口Connection | Gas |
CGA632 | AsH3, B2H6, PH3, SiH4 |
CGA640 | NF3 |
CGA716 | CF4, CHF3, C2F6 |
CGA720 | NH3 |

■ Orifice valve to prevent exceeded flowing
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![]() ![]() Cylinder with orifice valve |
Specification
● Orifices whose calibers are 0.2mm or 0.3mm are installed at the outlet of cylinder valve.
● If N2 gas of 47ℓ×14.7MPa with pressure regulation, the flowing rate is about 3,500ℓ/min. However, orifice(0.3mm) is installed at the outlet of the valve, the flowing rate can be controlled with 50~60ℓ/min.
● Gases, such as SiH4, if this kind of gases are flowed with big amount, they will not be flamed of itself but composed explosive mixture gas. For these gases, the valve can prevent an accident beforehand.
● In accordance with gases and mixed density, controlled flow rates are changed. So please contact to us beforehand.
● On orifice valve, 2 labels are attached. The one indicates caliber of orifice. The other is described "Cylinder with orifice installed valve" in Japanese.