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Silicon Semiconductor・LCD

Silicon Semiconductor・LCD

 CVD

SiH4　/　PH3　/　B2H6　/　SiH2Cl2
GeH4　/　Si2H6　/　SiF4
WF6　/　NH3　/　C3H6

 Cleaning and Etching

NF3　/　CO　/　C2F6
C3F8　/　C4F6
C5F8　/　CF4　/　CHF3
COS　/　C2HF5　/　CH2F2
CH3F　/　SF6　/　Cl2
BCl3　/　HBr

 Ion Inplant

SDS Safe Delivery Source　/　SDS AsH3　/　SDS PH3　/　SDS 11BF3
SDS PH3　/　SDS SiF4　/　SDS GeF4　/　SDS 72GeF4　/　SDS H2Se
AsH3mixture　/　PH3mixture　/　BF3
SiF4　/　GeF4

Compound semiconductor

AsH3　/　PH3　/　NH3

PV

SiH4　/　PH3　/　B2H6
GeH4　/　NH3　/　H2Se　/　NF3　/　 SF6

Multi- Purpose ・ Inert Gases

NO　/　H2
D2　/　Ar＋O2　/　He＋O2
Ar＋CH4　/　N2＋H2　　/　N2　/　O2
Ar　/　He

Standard gases and Pure gases

Cylinder ・ Valve

Cylinder
Valve

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