SDS2 SiF4 Silicon Tetrafluoride
| Specifications | ||
| Purity | ＞99.99 | vol.％ |
| Impurity | ||
| N2 | ＜80 | vol.ppm |
| O2 | ＜20 | vol.ppm |
| Cylinder・ *Supply volume Cylinder / Capacity |
Valve for Specialty Gas Valve |
|
| 4X（2.25ℓ）： | 250g（650Torr±50Torr at21℃） | 1/4" VCR |
| 7X（0.44ℓ）： | 50g（650Torr±50Torr at21℃） | |
※The definition of supply volume shall be a guaranteed value at using rate from 650 to 5Torr.
