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Silicon Semiconductor・LCD
| Gas name | |||
| SiH4 | Silane | PH3 | Phosphine |
| B2H6 | Diborane | SiH2Cl2 | Dichlorosilane |
| GeH4 | Germane | Si2H6 | Disilane |
| SiF4 | Silicon Tetrafluoride | WF6 | Tungsten Hexafluoride |
| NH3 | Ammonia | C3H6 | Propylene |
| Gas name | |||
| NF3 | Nitrogen Trifluoride | CO | Carbon monoxide |
| C2F6 | Hexafluoro Ethane | C3F8 | Octafluoro Propane |
| C4F6 | Hexafluoro-1,3-butadiene | C5F8 |
Octafluorocyclopentene |
| CF4 | Tetrafluoromethane | CHF3 | Trifluoromethane |
| COS | Carbonyl Sulfide | C2HF5 | Pentafluoroethane |
| CH2F2 | Difluoromethane | CH3F | Methyl Fluoride |
| SF6 | Sulfur Hexafluoride | Cl2 | Chlorine |
| BCl3 | Boron Trichloride | HBr | Hydrogen Bromide |
| Gas name | |||
| SDS AsH3 | Arsine | SDS PH3 | Phosphine |
| SDS 11BF3 | Boron Trifluoride | SDS SiF4 | Silicon Tetrafluoride |
| SDS GeF4 | Germanium tetrafluoride | SDS H2Se | Hydrogen Selenide |
| AsH3 mixture | Arsine Mixtures | PH3 mixture | Phosphine Mixtures |
| BF3 | Boron Trifluoride | SiF4 | Silicon Tetrafluoride |
| GeF4 | Germanium Tetrafluoride | ||