WF6 Tungsten Hexafluoride
| Specifications | ||
| Purity | ≧ 99.9995 | wt.％ |
| Impurity | ||
| N2 | ≦ 0.5 | ppm |
| O2+Ar | ≦ 0.5 | ppm |
| HF | ≦ 1 | ppm |
| CO | ≦ 0.5 | ppm |
| CO2 | ≦ 0.5 | ppm |
| SiF4 | ≦ 0.5 | ppm |
| SF6 | ≦ 0.5 | ppm |
| CF4 | ≦ 0.5 | ppm |
| THC(CH4) | ≦ 1 | ppm |
| T-CL | ≦ 0.1 | ppm |
| Al,As,B,Co,Cr,Fe,Li,Mg,Mn,Mo,Ni,Pb,Si,Ti | ≦ 10 | wt.ppb |
| Ca,Cu,K,Na | ≦ 5 | wt.ppb |
| Cd,P | ≦ 2 | wt.ppb |
| Th | ≦ 0.1 | wt.ppb |
| U | ≦ 0.05 | wt.ppb |
| Cylinder・Contents Cylinder/Content |
Valve for Specialty Gas Valve |
|
| 40L： | ～70kg | JIS.W22-14R／ DISS638 *option |
| 10L： | ～25kg | |
| Molecular Weight | 297.8 |
| UN Code | 2196 |
| Permissible Concentration | TLV value unsettled（Reference: TLV-TWA 2.5mg（F）/㎥, 1mg（W）/㎥ ） |
| Description | Colorless liquid |
| Odor | Odorless (pungent odor of hydrogen fluoride due to decomposition) |
| Specific Gravity | 10.28（21.1℃、0.1013 MPa） |
| Boiling Point | 17.3℃ |
| Density(Vapor) | 12.33kg/㎥ |
| Density(Liquid) | 3.39kg/ℓ（25℃） |
