Si2H6 Disilane
| Specifications | ||
| Purity | ＞99.99 | vol.％ |
| Impurity | ||
| N2 | ＜1 | vol.ppm |
| O2 | ＜1 | vol.ppm |
| H2 | ＜100 | vol.ppm |
| THC | ＜5 | vol.ppm |
| TーCL | ＜0.2 | vol.ppm |
| H2O | ＜5 | vol.ppm |
| Cylinder・Contents Cylinder/Content |
Valve for Specialty Gas Valve |
|
| 48L、47L： | ～10kg | JIS.W22-14L／ DISS632 *option |
| 10L、9.4L： | ～3kg | |
| Mixed Gas | Balance Gas | Concentration | Pressure | Cylinder Cylinder |
|
| N2、Ar、He、H2 | 10ppm～30％ | 10ppm～20％ Over 20% to 30% |
0.8MPa 0.5MPa |
48L | |
| 10ppm～1.2% Over 1.2% to 2% Over 2% to 3% Over 3% to 5% Over 5% to 10% |
14.7MPa 8.8MPa 5.9MPa 3.4MPa 1.5MPa |
47L、10L、9.4L | |||
| Special High Pressure Gas | |
| Molecular Weight | 62.22 |
| UN Code | 3161 |
| Permissible Concentration | TLV-TWA 5ppm（Reference: TLV-TWA 5ppm as SiH4） |
| Description | Colorless Gas |
| Odor | Pungent Odor |
| Specific Gravity | 2.297 |
| Boiling Point | -14.5℃ |
| Density(Vapor) | 2.78kg/㎥（0℃） |
| Density(Liquid) | 686g/ℓ（-25℃） |
| Sphere of Explosion | 0.5～100％（Less than） |
