SDS2 11BF3 Boron Trifluoride
| Specifications | ||
| Purity | ＞99.9 | vol.％ |
| 11B Level of concentration | ＞99.7 | atm.% |
| Impurity | ||
| N2 | ＜25 | vol.ppm |
| O2 | ＜25 | vol.ppm |
| Ar | ＜25 | vol.ppm |
| CO2 | ＜25 | vol.ppm |
| SO2 | ＜25 | vol.ppm |
| HF | ＜25 | vol.ppm |
| Cylinder・ *Supply volume Cylinder / Capacity |
Valve for Specialty Gas Valve |
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| SDS2 | 3X（6.6ℓ）： | 462g（650Torr±50Torr at21℃） | 1/2" VCR |
| 4X（2.25ℓ）： | 154g（650Torr±50Torr at21℃） | ||
| 7X（0.44ℓ）： | 31g（650Torr±50Torr at21℃） | ||
| SDS3 | 3X（7.5ℓ）： | 990g（650Torr±50Torr at21℃） | |
| 4X（2.5ℓ）： | 330g（650Torr±50Torr at21℃） |
※The definition of supply volume shall be a guaranteed value at using rate from 650 to 5Torr.
Desorption characteristics
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