SiF4 Silicon Tetrafluoride
| Specifications | ||
| Purity | ＞99.999 | vol.％ |
| Impurity | ||
| N2+O2 | ＜4.0 | vol.ppm |
| CO | ＜0.1 | vol.ppm |
| CO2 | ＜3.0 | vol.ppm |
| CH4 | ＜0.1 | vol.ppm |
| SO2 | ＜0.1 | vol.ppm |
| H2S | ＜0.1 | vol.ppm |
| Cylinder・Contents Cylinder/Content |
Valve for Specialty Gas Valve |
|
| 47ℓ： | ～10kg | JIS.W22-14L／ DISS636 *option |
| 10ℓ： | ～5kg | |
| High Pressure Gas | |
| Molecular Weight | 104.1 |
| UN Code | 1859 |
| Permissible Concentration | TLV value unsettled （Reference: TLV-TWA 2.5mg（F）/㎥） |
| Description | Colorless Gas |
| Odor | Strong pungent odor similar to hydrogen chloride |
| Specific Gravity | 3.59（21℃、0.1013 MPa） |
| Boiling Point | -94.8℃ |
| Density(Vapor) | 4.31kg/㎥ （21℃、0.1013 MPa） |
| Density(Liquid) | 1.52kg/ℓ（-70℃） |
