SiH4 Silane
| Specifications | ||
| Purity | ＞99.9995 | vol.％ |
| Impurity | ||
| N2 | ＜1 | vol.ppm |
| O2+Ar | ＜1 | vol.ppm |
| CO | ＜0.1 | vol.ppm |
| CO2 | ＜0.1 | vol.ppm |
| CH4 | ＜0.1 | vol.ppm |
| T-CL | ＜0.5 | vol.ppm |
| H2O | ＜0.5 | vol.ppm |
| Cylinder・Contents Cylinder/Content |
Valve for Specialty Gas Valve |
|
| 47L： | ～11.75㎏ | JIS.W22-14L／ DISS632 *option |
| 10L： | ～1㎏ | |
| Mixed Gas | Balance Gas | Concentration | Pressure | Cylinder Cylinder |
Valve for Specialty Gas Valve |
|
| N2、Ar、He、H2 | 1ppm～50％ | 10ppm～10％ 11～20％ 21～50％ |
14.7MPa 11.8MPa 4.9MPa |
47ℓ/10ℓ | JIS.W22-14L／ DISS632 ※option |
|
| Special High Pressure Gas | |
| Molecular Weight | 32.12 |
| UN Code | 2203 |
| Permissible Concentration | TLV-TWA 5ppm 6.6mg/㎥ |
| Description | Colorless Gas |
| Odor | Repulsive Odor |
| Specific Gravity | 1.114 (20℃,0.1MPa) |
| Boiling Point | -111.5℃ |
| Density(Vapor) | 1.342Kg/㎥ (20℃,0.1MPa) |
| Density(Liquid) | 0.68kg/ℓ (-185℃) |
| Sphere of Explosion | 1.35～98％ |
| Mutagenicity | Positive |
