ClF3 Chlorine Trifluoride
| Specifications | ||
| Purity | ＞99.9 | wt.％ |
| Impurity | ||
| N2+O2 | ＜70 | wt.ppm |
| HF | ＜700 | wt.ppm |
| Fe | ＜1 | wt.ppm |
| Ni | ＜1 | wt.ppm |
| Cr | ＜1 | wt.ppm |
| Na | ＜1 | wt.ppm |
| K | ＜1 | wt.ppm |
| Ca | ＜1 | wt.ppm |
| Cu | ＜1 | wt.ppm |
| Co | ＜1 | wt.ppm |
| Cylinder・Contents Cylinder/Content |
Valve for Specialty Gas Valve |
|
| 40ℓ： | ～50kg | JIS.W22-14R |
| 10ℓ： | ～10kg | |
| Molecular Weight | 92.45 |
| UN Code | 1749 |
| Permissible Concentration | TLV-C 0.1ppm |
| Description | Colorless Gas |
| Odor | Repulsive Odor |
| Specific Gravity | 1.82（20℃, 0.1MPa） |
| Boiling Point | 11.75℃ |
